The present invention relates to a nano-scale flash memory device having a
saddle structure, and a fabrication method thereof. Particularly, the
invention relates to a highly integrated, high-performance flash memory
device having a saddle structure for improving the scaling-down
characteristic and performance of the MOS-based flash memory device.
According to the invention, a portion of an insulating film around a
recessed channel is selectively removed to expose the surface and sides
of the recessed channel. A tunneling insulating film is formed on the
exposed surface and sides of the recessed channel. On the resulting
structure, a floating electrode, an inter-electrode insulating film and a
control electrode are formed, thus fabricating the device. Particularly
when the floating electrode is made of an insulating nitride film or
pluralities of nano-scale dots, an excellent memory device can be made
without using an additional mask. According to the invention, the
scaling-down characteristic of the device is excellent, and current drive
capability can be greatly increased since a channel through which current
can flow is formed on the surface and sides of the recessed channel.
Also, the ability of the control electrode to control the channel can be
enhanced, so that memory write/erase characteristics can be improved.