A process and apparatus for the synthesis of metal oxide nanopowder from a
metal compound vapour is presented. In particular a process and apparatus
for the synthesis of TiO.sub.2 nanopowder from TiCl.sub.4 is disclosed.
The metal compound vapour is reacted with an oxidizing gas in
electrically induced RF frequency plasma thus forming a metal oxide
vapour. The metal oxide vapour is rapidly cooled using a highly turbulent
gas quench zone which quickly halts the particle growth process, yielding
a substantial reduction in the size of metal oxide particles formed
compared with known processes. The metal compound vapour can also react
with a doping agent to create a doped metal oxide nanopowder.
Additionally, a process and apparatus for the inline synthesis of a
coated metal oxide is disclosed wherein the metal oxide particles are
coated with a surface agent after being cooled in a highly turbulent gas
quench zone.