A high-voltage transistor device has a first well region with a first
conductivity type in a semiconductor substrate, and a second well region
with a second conductivity type in the semiconductor substrate
substantially adjacent to the first well region. A field ring with the
second conductivity type is formed on a portion of the first well region,
and the top surface of the field ring has at least one curved recess. A
field dielectric region is formed on the field ring and extends to a
portion of the first well region. A gate structure is formed over a
portion of the field dielectric region and extends to a portion of the
second well region.