One embodiment of the present invention provides a system that determines
a location in a layout to place an assist feature. During operation, the
system receives a layout of an integrated circuit. Next, the system
selects an evaluation point in the layout. The system then chooses a
candidate location in the layout for placing an assist feature. Next, the
system determines the final location in the layout to place an assist
feature by, iteratively, (a) selecting perturbation locations for placing
representative assist features in the proximity of the candidate
location, (b) computing aerial-images using an image intensity model, the
layout, and by placing representative assist features at the candidate
location and the perturbation locations, (c) calculating image-gradient
magnitudes at the evaluation point based on the aerial-images, and (d)
updating the candidate location for the assist feature based on the
image-gradient magnitudes.