A thin film solid oxide fuel cell (TFSOFC) having a porous metallic anode
and a porous cathode is provided. The fuel cell is formed by using a
continuous metal foil as a substrate onto which is deposited a thin anode
metal layer which is then patterned to reveal an array of pores in the
anode. A dense thin film electrolyte is then deposited onto the porous
anode layer overcoating the anode and filling the anode pores. The
substrate foil layer is then removed to allow for exposure of the porous
anode/electrolyte to fuel. The cathode is then formed on the electrolyte
by depositing a cathode thin film cap using known film deposition
techniques. Further processing may be used to increase the porosity of
the electrodes. The metal foil may be treated to have an atomically
ordered surface, which makes possible an atomically ordered anode and
atomically ordered thin film electrolyte for improved performance.