A method for manufacturing a hermetically sealed micro-device package
encapsulating a micro-device. The package includes a transparent window
allowing light to pass into and out of a cavity containing the
micro-device. A first frame-attachment area is prepared on semiconductor
substrate having a micro-device operably disposed thereupon, the first
frame-attachment area having a plan that circumscribes the micro-device.
A second frame-attachment area is prepared on a sheet of transparent
material, the second frame-attachment area having a plan that
circumscribes a window aperture portion of the sheet. A frame/spacer is
positioned between the semiconductor substrate and the sheet, the
frame/spacer including a continuous sidewall having a plan on one side
substantially corresponding to, and substantially in register with, the
plan of the first frame-attachment area, having a plan on the opposite
side substantially corresponding to, and substantially in register with,
the plan of the second frame-attachment area, and having a height that
exceeds the height of the micro-device. Next the substrate, frame/spacer
and window are bonded together to form a hermetically sealed package
encapsulating the micro-device in a cavity below the window aperture
portion of the transparent sheet.