A method and apparatus for removing a first liquid from a surface of a
substrate is provided. A second liquid is supplied to at least part of a
surface of a substrate having a rotary movement. The rotary movement has
a center of rotation and an edge of rotation. The second liquid is
directed from the center of rotation to the edge of rotation using a
nozzle. A dry zone is created on the substrate as the position of the
spray moves from the center of rotation to the edge of rotation. As a
result, the first liquid and the second liquid are removed from the
surface of the substrate.