A micro movable element includes a micro movable substrate, a package base
and an electroconductive connector. The micro movable substrate is
provided with a micro movable unit that includes a frame, a pivotally
movable portion, a torsion connector connecting the frame and the movable
portion, and an actuator to generate driving force for the pivotal motion
of the movable portion. The package base includes an internal
interconnect structure. The electroconductive connector is provided
between the micro movable substrate and the package base for electrically
connecting the actuator and the internal interconnect structure to each
other.