A ferroelectric memory device, which includes a vertical ferroelectric
capacitor having an electrode distance smaller than a minimum feature
size of lithography technology being used and suitable for the
miniaturization, and a method of manufacturing the same are disclosed.
According to one aspect of the present invention, it is provided a
ferroelectric memory device comprising an MIS transistor formed on a
substrate, and a ferroelectric capacitor formed on an interlevel
insulator above the MIS transistor, wherein a pair of electrodes of the
ferroelectric capacitor are disposed in a channel length direction of the
MIS transistor to face each other putting a ferroelectric film
in-between, and wherein a distance between the electrodes of the
ferroelectric capacitor is smaller than a gate length of the MIS
transistor.