A tape out template system is provided. The tape out template system comprises a template database, a query database, and a processor. The template database stores a plurality of templates for mask tooling for different manufacturing technologies. Each of the templates comprises a set of mask tooling settings for different manufacturing processes of one of the manufacturing technologies. The query database stores a hierarchy of queries addressing differences among mask tooling information of the manufacturing processes. The processor receives technology information specifying the manufacturing technology of the tape out request, selects one of the templates according to the received technology information, selects and presents at least one of the queries according to the selected template, and determines values of the mask tooling settings according to the answers to the presented queries.