In a method of creating a permanent structure with high spatial resolution, a substance which may be modified by an optical signal is provided in a writing area. The optical signal is applied to the writing area in such a way that a spatially limited partial area of the writing area is purposefully omitted, the spatially limited partial area being a local intensity minimum of the optical signal, and the optical signal, outside of the spatially limited partial area, being applied to the writing area in such a way that saturation is achieved in modifying the substance with the optical signal. Then, different states of the substance in the spatially limited partial area and of the substance in the partial areas of the writing area covered by the optical signal are permanently adjusted.