A system and method for identifying misalignments in an overlapping region
of a stitched circuit in an integrated circuit fabrication process. The
method comprises: creating a first circuit using a reference mask,
wherein first circuit includes a first part of an offset dependent
resistor structure in the overlapping region; creating a second circuit
using a secondary mask, wherein the second circuit includes a second part
of the offset dependent resistor structure in the overlapping region,
wherein the offset dependent resistor structure includes a plurality of
nubs that interconnect the first part and the second part of theis offset
dependent resistor structure; measuring a resistance across the offset
dependent resistor structure; and determining an amount of misalignment
based on the measured resistance.