The present invention provides a polishing apparatus for polishing a
periphery of a substrate. This polishing apparatus includes a rotary
holding mechanism configured to hold the substrate horizontally and
rotate the substrate, plural polishing head assemblies provided around
the substrate, plural tape supplying and recovering mechanisms configured
to supply polishing tapes to the plural polishing head assemblies and
recover the polishing tapes from the plural polishing head assemblies,
and plural moving mechanisms configured to move the plural polishing head
assemblies in radial directions of the substrate held by the rotary
holding mechanism. The tape supplying and recovering mechanisms are
located outwardly of the plural polishing head assemblies in the radial
directions of the substrate, and the tape supplying and recovering
mechanisms are fixed in position.