A polishing apparatus can supply a polishing liquid uniformly and
efficiently to a surface to be polished of a workpiece. The polishing
apparatus includes a polishing table having a polishing surface, and a
top ring for holding a semiconductor wafer and pressing the semiconductor
wafer against the polishing surface. The polishing apparatus also
includes a polishing liquid supply port for supplying a polishing liquid
to the polishing surface, and a moving mechanism for moving the polishing
liquid supply port to distribute the polishing liquid uniformly over an
entire surface of the workpiece due to relative movement of the workpiece
and the polishing surface.