The invention relates to a nonvolatile semiconductor storage element and
an associated production and control method, the storage element includes
a semiconductor substrate having a source region, a drain region and an
intermediate channel region. On a first portion of the channel region, a
control layer is formed and insulated from the channel region by a first
insulating layer whereas respective charge storage layers are formed in a
second portion of the channel region and are insulated from the channel
region by a second insulating layer. On the charge storage layer, a
programming layer is formed and insulated from the charge storage layer
by a third insulating layer and is electrically connected to a respective
source region and drain region via a respective interconnect layer.