A method of reducing parametric variation in an integrated circuit (IC)
chip and an IC chip with reduced parametric variation. The method
includes: on a first wafer having a first arrangement of chips, each IC
chip divided into a second arrangement of regions, measuring a test
device parameter of test devices distributed in different regions; and on
a second wafer having the first arrangement of IC chips and the second
arrangement of regions, adjusting a functional device parameter of
identically designed field effect transistors within one or more regions
of all IC chips of the second wafer based on a values of the test device
parameter measured on test devices in regions of the IC chip of the first
wafer by a non-uniform adjustment of physical or metallurgical
polysilicon gate widths of the identically designed field effect
transistors from region to region within each IC chip.