A method of forming an aligned connection between a nanotube layer and a
raised feature is disclosed. A substrate having a raised feature has
spacers formed next to the side of the raised feature. The spacers are
etched until the sidewalls of the raised feature are exposed forming a
notched feature at the top of the spacers. A patterned nanotube layer is
formed such that the nanotube layer overlies the top of the spacer and
contacts a side portion of the raised feature in the notched feature. The
nanotube layer is then covered with an insulating layer. Then a top
portion of the insulating layer is removed to expose a top portion of the
etched feature.