An imaging, differential optical sectioning interference microscopy
(DOSIM) system and method for measuring refractive indices and
thicknesses of transparent thin-films. The refractive index and thickness
are calculated from two interferometric images of the sample transparent
thin-film having a vertical offset that falls within the linear region of
an axial response curve of optically sectioning microscopy. Here, the
images are formed by a microscope objective in the normal direction,
i.e., in the direction perpendicular to the latitudinal surface of the
thin-film. As a result, the lateral resolution of the transparent
thin-film is estimated based on the Rayleigh criterion, 0.61.lamda./NA.