A cantilever array having a simple structure and being able to reliably
detect a surface of a sample, a method for fabricating the same, a
scanning probe microscope, a sliding apparatus of a guiding and rotating
mechanism, a sensor, a homodyne laser interferometer, a laser Doppler
interferometer having an optically exciting function for exciting a
sample, each using the same, and a method for exciting cantilevers. The
cantilever array includes a large number of compliant cantilevers sliding
on a surface of a sample.