In a semiconductor device having element isolation made of a trench-type
isolating oxide film 13, large and small dummy patterns 11 of two types,
being an active region of a dummy, are located in an isolating region 10,
the large dummy patterns 11b are arranged at a position apart from actual
patterns 9, and the small dummy patterns 11a are regularly arranged in a
gap at around a periphery of the actual patterns 9, whereby uniformity of
an abrading rate is improved at a time of abrading an isolating oxide
film 13a is improved, and surface flatness of the semiconductor device
becomes preferable.