There is provided a reaction vessel whereby silicon produced can be
smoothly recovered dropwise without excessive thermal load on
constitutional parts of the reaction vessel, a silicon deposition
feedstock gas can be reacted efficiently even when the reaction vessel is
scaled up to industrial large-scale equipment, generation of silicon fine
powder and silane oligomers can be suppressed, and industrial silicon
production can be performed over extended periods. The tubular reaction
vessel comprises a longitudinally-extending wall with a space
thereinside, wherein a silicon deposition feedstock gas inflow opening
and a deposited silicon discharge opening are provided at an upper
portion and a lower end portion respectively, and a flow
resistance-increasing region is created on a wall surface of the tubular
reaction vessel that is contacted with a feedstock gas. The flow
resistance-increasing region is at least one of protrudent, concave and
sloped regions.