The present invention relates to a method for producing highly pure,
granular silicon with a narrow particle-size distribution by decomposing
silanes or halosilanes in a fluidised bed and epitaxially growing silicon
on silicon seed particles, which method is characterised in that the gas
containing silicon is supplied to the reaction chamber in an upward flow
and the contents of the fluidised bed are separated in a continuous or
discontinuous manner, whereby a particle stream from the fluidised bed is
supplied to a separator mounted outside the fluidised bed, particles of
the desired size are separated and undersized particles are returned to
the fluidised bed. The invention also relates to a device and the use
thereof for carrying out said method.