A non-volatile memory device includes isolation layers, a cell trench, a
floating gate, a common source region and a word line. The isolation
layers define an active region of a substrate. The cell trench is formed
in the active region. The cell trench extends in a first direction. The
floating gate is formed on the active region and in the cell trench. The
common source region is formed on the active region adjacent a second
side face of the floating gate and extends in a second direction
substantially perpendicular to the first direction. The word line is
formed on the active region, which is adjacent to a first side face of
the floating gate opposite to the second side face, and the isolation
layers and in the cell trench. The word line extends in the second
direction.