A measurement probe 1 for measuring a surface of sample S comprises a base
section 10, a head section 30 having a probe tip 31, and a support
structure section 15 which supports the head section 30 with the base
section 10 along a support axis substantially orthogonal to the vertical
axis in the direction of protrusion of the probe tip 31. The support
structure section 15 includes two spring structure sections of a first
spring structure section 20 deformable in the direction of the vertical
axis; and a second spring structure section 25 deformable in the
direction of the lateral axis, and a reflection surface 32 which is
formed with a reflection pattern varying the reflectance within the
surface is provided at the side opposite to the probe tip 31 of the head
section 30. By using this structure, there are obtained the measurement
probe, the sample surface measuring apparatus, and the sample surface
measuring method, which can improve the accuracy of measurement of the
sample surface without using a special measuring system.