A reflectometry method and apparatus for gathering meaningful reflectance
data indicative of one or more characteristics of a substance being grown
on a horizontal substrate within a reaction chamber. The apparatus
includes an external light source which shines light into the chamber
through an opening having a shutter for selectively permitting or
preventing the light from passing in and out of the chamber through the
opening. A detector receives light that reflects off the substance and
exits the chamber through the opening. During operation, the substrate is
rotated about an axis substantially normal to the growing plane within
the reaction chamber to ensure uniform deposition of the substance
thereon. The shutter momentarily opens in synchronicity with the speed of
revolution of the substrate such that substantially the same discrete
area of the growing substance is illuminated so as to eliminate the
effects of precession on the measurements.