A process for producing a fluorine gas of the invention comprises a step
(1) of generating a fluorine gas by sectioning the interior of a fluorine
gas generation container equipped with a heating means, by the use of a
structure having gas permeability, then filling each section with a
high-valence metal fluoride and heating the high-valence metal fluoride.
The process may comprise a step (2) of allowing the high-valence metal
fluoride, from which a fluorine gas has been generated in the step (1),
to occlude a fluorine gas. According to the process of the invention, a
high-purity fluorine gas that is employable as an etching gas or a
cleaning gas in the process for manufacturing semiconductors or liquid
crystals can be produced inexpensively on a mass scale.