A vertical-cavity surface-emitting laser incorporating a supported air gap
distributed Bragg reflector is disclosed. The supported air gap DBR
includes a regrowth layer of material that provides mechanical support
for the original material layers. The supported air gap DBR is fabricated
by first growing alternating pairs of a first material and a sacrificial
material over a suitable substrate. The layer pairs of the first material
and sacrificial material are covered by a suitable dielectric material.
The dielectric material is then selectively removed exposing regions of
the first material and sacrificial material where selective regrowth of
additional material is desired. The selective regrowth of the additional
material provides mechanical support for the semiconductor material that
remains after a selective etch removal of the sacrificial material.