Avalanche photodiodes are provided, wherein the APDs provide both high
optical coupling efficiency and low dark count rate. The APDs are formed
such that their cap layer has an active region of sufficient width to
enable high optical coupling efficiency but the APD still exhibits a low
dark count rate. These cap layers have a device area with an active
region and an edge region, wherein the size of the active region is
substantially matched to the mode-field diameter of an optical beam, and
wherein the size of the edge region is made small so as to reduce the
number of defects included. These APD designs maintain a substantially
uniform gain and breakdown voltage, as necessary for practical use.