A memory cell in a semiconductor memory device has a pair of charge traps
formed on opposite sides of a control electrode, above variable
resistance regions in the semiconductor substrate. Each charge trap
includes a tunnel oxide film, a dual-layer charge trapping film, and a
top oxide film. The dual-layer charge trapping film includes a
silicon-rich silicon nitride layer or amorphous silicon layer adjacent to
the tunnel oxide film, and a stoichiometric or nitrogen-rich silicon
nitride layer adjacent to the top oxide film. Most charges injected into
the charge trapping film are trapped in the layer adjacent to the tunnel
oxide film, near the substrate, which facilitates the reading of the data
that the trapped charges represent.