An integration scheme that enables full silicidation (FUSI) of the nFET
and pFET gate electrodes at the same time as that of the source/drain
regions is provided. The FUSI of the gate electrodes eliminates the gate
depletion problem that is observed with polysilicon gate electrodes. In
addition, the inventive integration scheme creates different silicon
thicknesses of the gate electrode just prior to silicidation. This
feature of the present invention allows for fabricating nFETs and pFETs
that have a band edge workfunction that is tailored for the specific
device region.