A microelectronics apparatus comprising a substrate, a pair of grid
electrodes coupled to the substrate on opposing sides of a central axis,
wherein the grid electrodes are substantially parallel to each other and
extend substantially perpendicular from the substrate, and a plurality of
ion reflection lenses each coupled to the substrate, wherein each ion
reflection lens: (1) is substantially perpendicular to each of the grid
electrodes; (2) extends substantially perpendicular from the substrate;
and (3) has an aperture aligned with the central axis.