In a temperature control device, a plurality of screening cylinders each
having a different diameter are concentrically arranged within a liquid
tank to concentrically form a plurality of layered channels which are
communicated to define a circulation passage through which
constant-temperature fluid flows. A heat transfer tube through which
liquid chemical flows is disposed in any one of the channels such that
heat exchange between the liquid chemical and the constant-temperature
fluid is performed via the heat transfer tube for controlling
temperatures of the liquid chemical.