A method of applying optical proximity correction features to a mask
having a plurality of features to be imaged. The method includes the
steps of defining a set of process parameters to be utilized to image the
mask; defining a set of pitch ranges corresponding to pitches exhibited
by the plurality of features to be imaged; determining an interference
map for at least one of the pitch ranges; and generating a set of rules
for positioning scattering bars adjacent the plurality of features based
on the interference map, where the set of rules governs scattering bar
placement for features having a pitch which falls within the pitch range
utilized to generate the interference map.