A photosensitive resin composition includes (a) a resin comprising a repeating unit represented by a following formula (1); (b) a photosensitive agent; (c) a thermo-acid generator; and (d) a compound having at least one of an alkoxymethyl group and an acyloxymethyl group, ##STR00001## wherein R.sup.1 represents a divalent to octavalent organic group containing 2 or more carbon atoms, R.sup.2 represents a divalent to hexavalent organic group containing 2 or more carbon atoms, each of R.sup.0 and R.sup.3 independently represents a hydrogen atom or an organic group containing 1 to 20 carbon atoms, m represents an integer of 0 to 2, and each of p and q represents an integer of 0 to 4, provided that p+q>0.