An apparatus comprising a substrate having a probe suspension formed
thereon, a see-saw probe coupled to the probe suspension, the see-saw
probe including first and second ends, with a tip projecting from a side
of the first end, and an actuation electrode formed on the substrate, the
actuation electrode positioned to exert a force upon the second end of
the see-saw probe. A process comprising forming a probe suspension on a
substrate, coupling a see-saw probe to the probe suspension, the see-saw
probe including first and second ends, with a tip projecting from a side
of the first end, and forming an actuation electrode on the substrate,
the actuation electrode positioned to exert a force upon the second end
of the see-saw probe.