A semiconductor apparatus includes a first semiconductor layer, a second
semiconductor layer provided on a major surface of the first
semiconductor layer, a third semiconductor layer provided on the major
surface and being adjacent to the second semiconductor layer, a
termination semiconductor layer provided on the major surface of the
first semiconductor layer in a termination region outside the device
region, a channel stop layer, and a channel stop electrode. The channel
stop layer is provided in contact with the termination semiconductor
layer on the major surface of the first semiconductor layer in an
outermost peripheral portion outside the termination semiconductor layer
and has a higher impurity concentration than the termination
semiconductor layer. The channel stop electrode is provided on at least
part of a surface of the channel stop layer and projects toward the
termination semiconductor layer beyond at least a superficial portion of
the channel stop layer.