Liquid nanoscale particle precursor materials for generating nanoscale particles include at least one high volatility carrier and a second component. A nanoscale particle generating device generates nanoscale particles by passing a liquid nanoscale particle precursor material through a flow passage heated to convert the carrier into a vapor and the second component into nanoscale particles. The nanoscale particles preferably consist essentially of the second component and can consist essentially of dry, solid particles. The particle generator can be incorporated in a hand held inhaler, and can be delivered to a targeted portion of the lung using the inhaler. Composite controlled release particles of micron or nanoscale size can be produced by flowing a solution of medicament, control release agent and carrier liquid through a capillary heater.