There have been problems in that a dedicated apparatus is needed for a
conventional method of manufacturing an organic thin film transistor and
in that: a little amount of an organic semiconductor film is formed with
respect to a usage amount of a material; and most of the used material is
discarded. Further, apparatus maintenance such as cleaning of the inside
of an apparatus cup or chamber has needed to be frequently carried out in
order to remove the contamination resulting from the material that is
wastefully discarded. Therefore, a great cost for materials and man-hours
for maintenance of apparatus have been required. In the present
invention, a uniform organic semiconductor film is formed by forming an
aperture between a first substrate for forming the organic semiconductor
film and a second substrate used for injection with an insulating film
formed at a specific spot and by injecting an organic semiconductor film
material into the aperture due to capillarity to the aperture. The
insulating film formed at the specific spot enables formation of the
organic semiconductor film with high controllability. Further, the
insulating film can also serve as a spacer that holds the aperture, that
is, an interval (gap) between the substrates.