A method for operating an integrated circuit tester information processing
system includes: measuring current information from test structures for
an integrated circuit having a stress liner; forming a transfer curve by
simulating based on the current information with a first range of first
mobility multipliers; forming an inverse transfer curve by applying an
inverse transfer function to the transfer curve; forming a stress curve
with second mobility multipliers from the inverse curve; and validating
the second mobility multipliers by comparing a measured curve and a
simulated curve with the measured curve based on the current information
and the simulated curve based on stress curve.