A method/apparatus may comprise operating a line narrowed pulsed excimer
or molecular fluorine gas discharge laser system by using a seed laser
oscillator to produce an output which may comprise a first gas discharge
excimer or molecular fluorine laser chamber; a line narrowing module; a
laser amplification stage which may comprise a ring power amplification
stage; the method of operation may the steps of: selecting a differential
timing between an electrical discharge between a pair of electrodes in
the first laser chamber and in the second laser chamber which at the same
time keeps ASE below a selected limit and the pulse energy of the laser
system output light beam of pulses essentially constant.