A laser beam irradiation apparatus includes an oscillation unit, an
acousto-optic deflection unit for deflecting a laser beam oscillated by
the oscillation unit, a condenser for condensing the deflected laser
beam, and a control unit. The control unit determines an actual output
power of the laser beam based on a light reception signal received from
laser beam output detection means in response to a control signal for
controlling a deflection angle adjustment unit of the deflection unit.
Then, the control unit arithmetically operates the ratio of an actual
output power corresponding to the control signal with reference to the
lowest value of the actual output power. Further, the control unit
arithmetically operates a correction value corresponding to the ratio of
the actual output power to produce a control map and controls the output
adjustment unit based on the control map.