The Lateral-Moving Micromachined Thermal Bimorph provides the capability
of achieving in-plane thermally-induced motion on a microchip, as opposed
to the much more common out-of-plane, or vertical, motion seen in many
devices. The present invention employs a novel fabrication process to
allow the fabrication of a lateral bimorph in a fundamentally planar set
of processes. In addition, the invention incorporates special design
features that allow the bimorph to maintain material interfaces.