An apparatus and methods for nanolithography using nanoscale optics are
disclosed herein. Submicron-scale structures may be obtained using
standard photolithography systems with a de-magnifying lens. A
de-magnifying lens for use in a standard photolithography system includes
a film having a top surface, a bottom surface and a plurality of
cylindrical channels containing a dielectric material; and an array of
carbon nanotubes penetrating the film through the plurality of
cylindrical channels, wherein an image on the top surface of the film is
converted into a de-magnified image on the bottom surface of the film by
the carbon nanotubes.