A plating apparatus has a steam treatment chamber configured to perform a
steam treatment using steam on a surface of a substrate, and a plating
chamber configured to plate the surface of the substrate subjected to the
steam treatment. The plating apparatus also has an acid treatment chamber
configured to bring the surface of the substrate subjected to the steam
treatment into contact with an acid liquid. The plating apparatus
includes a frame housing the steam treatment chamber, the acid treatment
chamber, and the plating chamber.