Provided is a positive photosensitive resin composition which is
advantageous not only in excellent sensitivity, resolution and adhesion,
but also in excellent heat resistance even when the composition is cured
by a low-temperature process at equal to or lower than 280.degree. C., as
well as low water absorption and capability to give a pattern with
favorable configuration. The positive photosensitive resin composition
contains: (a) alkaline aqueous solution-soluble polyamide having a
polyoxazole precursor structure; (b) an o-quinonediazide compound; and
(c) a latent acid generator which generates acid upon heating. The
composition optionally further contains (d) a compound having a phenolic
hydroxyl group or (e) a solvent.