A method for the operation of an in-line coating configuration comprising 2n+1 chambers, where n is an integer, and specifically is preferably 2. Thus, at least between two times two chambers of this installation one gate each can be opened and closed, it is possible to coat also overdimensioned substrates with the same installation. The opening and closing of the gates entails a change of the pressure courses in comparison to standard operation.

 
Web www.patentalert.com

< Method and apparatus for controlling dopant concentration during BPSG film deposition to reduce nitride consumption

> System for agitating the fluid contents of a container

> Fingerprint sensors using membrane switch arrays

~ 00571