A protective film structure (100) includes a base (110) and a resistive film (120) formed on a surface of the base. The base is comprised of amorphous boron nitride or amorphous boron carbide, and is formed on a surface of a substrate (10) to be protected. The resistive film includes an adhesive layer (121), an intermediate layer (122) and an outermost layer (123), which are formed on a surface of the base one on top of the other in that order.