The present invention provides an apparatus comprising a device and a mechanism for heat transfer comprising a hydrofluoroether heat-transfer fluid wherein the heat transfer fluid is represented by the following structure: R.sub.f--O--R.sub.h--O--R.sub.f' wherein O is oxygen; R.sub.f and R.sub.f' are, independently, a fluoroaliphatic group, wherein each R.sub.f and R.sub.f' contain 1 hydrogen atom; R.sub.h is independently a linear, branched or cyclic alkylene group having from 2 to about 8 carbon atoms and at least 4 hydrogen atoms, and wherein the hydrofluoroether compound is free of --O--CH.sub.2--O--. Another embodiment of the present invention is a method therefor.

 
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> Heating and cooling plate for a vacuum chamber

~ 00575