An apparatus for measuring a structural characteristic between a
polysilicon shape and a silicon area. The apparatus for measuring a
structural characteristic between a polysilicon shape and a silicon area
comprises the silicon area, and a plurality of polysilicon shapes each
having a unique orientation relative to the silicon area wherein each of
the polysilicon shapes is formed having an angle less than or equal to a
critical angle. The critical angle is an angle at or below which a
sidewall spacer no longer is formed on a polysilicon shape, thereby
causing the polysilicon shape to short circuit to an underlying portion
of the silicon area by way of a silicide bridge.