Structures and methods for forming the same. A semiconductor chip includes
a substrate and a transistor. The chip includes N interconnect layers on
the substrate, N being a positive integer. The chip includes a cooling
pipes system inside the N interconnect layers. The cooling pipes system
does not include any solid or liquid material. Given any first point and
any second point in the cooling pipes system, there exists a continuous
path which connects the first and second points and which is totally
within the cooling pipes system. A first portion of the cooling pipes
system overlaps the transistor. A second portion of the cooling pipes
system is higher than the substrate and lower than a top interconnect
layer. The second portion is in direct physical contact with a
surrounding ambient.